ATOMIC FORCE SCANNING ELECTRON MICROSCOPY (AFSEM)
The AFSEM is an add-on for field emission SEM (scanning electron microscopy) or dual-beam FIB (focused ion beam) that enables topographic characterization, imaging, and chemical analysis without removing the sample from the SEM. This technique can investigate a maximum size of 30 x 30 µm2 in a single measurement. Additionally, the AFSEM allows for atomic force microscopy (AFM) investigations under high vacuum conditions.
Application
– Any kind of materials, where topological information has to be combined with SEM imaging and/or chemical characterization by EDX (Energy Dispersive Spectroscopy)
